The schematic view of a magnetron sputtering system is shown in the left. There are a permanent magnet in the center and a yoke around the magnet. |
Lines of magnetic force are shown. The magnitude of a field is shown by the color. The equivalue surface of plasma density is expressed. It is shown that the plasma is confined by a magnetic field. |
An electron orbit is shown. It is obtained by the particle code. The electron energy is shown by the color. |
The magnetic field is controlled by using a compressed coil. When the intensity of a current is changed, then the configurations of a magnetic field are modified. |